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MEMSnet Home: MEMS-Talk: poly-si membrane by surface micromachining
poly-si membrane by surface micromachining
2001-03-16
Ebin Liao
poly-si membrane by surface micromachining
Ebin Liao
2001-03-16
Hi, MEMS colleagues:

I'm involved in a project of MEMS-based pressure
sensor, thus I'm looking for a company who can
fabricate poly-silicon membrane by surface
micromachining technology. Their design rules are also
needed. Thank you very much!

Best regards,

Ebin

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