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MEMSnet Home: MEMS-Talk: wet etching platinum
wet etching platinum
2001-04-06
B.J. Gallacher
wet etching platinum
B.J. Gallacher
2001-04-06
Hello,

I'm trying to wet etch platinum.
I've tried 7HCl:1HNO3:8H20 at 60deg,
the platinum does etch but the resist flakes off.

Does anyone know of any alternative to aqua regia that is resist friendly?
Perhaps Potassium Bromide+ Bromine?

Many Thanks
Barry Gallacher

University of Newcastle


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