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MEMSnet Home: MEMS-Talk: measure of a SiO2 surface activated by plasma
measure of a SiO2 surface activated by plasma
2001-04-12
Laurent Le Moullec
measure of a SiO2 surface activated by plasma
Laurent Le Moullec
2001-04-12
We would like to activate a SiO2 surface in order to prepare a deposit. We
want to compare RIE and Barrel system plasma for that, so we need to
measure this activation, do you have a method?
Thank you for your help

Laurent


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