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MEMSnet Home: MEMS-Talk: Photolithography on silicone
Photolithography on silicone
2001-04-20
Forrest B. Christo
Photolithography on silicone
Forrest B. Christo
2001-04-20
Has anyone tried patterning silicone using photolithography?  The normal
photoresist strip procedure I have uses acetone to remove the resist, and
the acetone dissolves the silicone.  I have heard that there are
water based resist-strip solutions, which i geuss might work?

Forrest Christo
Princeton University


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