A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Looking for TaN etchant
Looking for TaN etchant
2001-04-25
baiwp
Looking for TaN etchant
baiwp
2001-04-25
Dear MEMS community,

I would like to know if there is an echant for TaN film (Positive
Photoresist is prefered). The Tantalum Nitride film is the electrode for
my devices, ~2000A. I know one etchant called TNE-12, but this is with
negative resist. Do you have any idea about this?

Thank you very much!!

Weiping

UT Austin


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation
MEMS Technology Review
Harrick Plasma, Inc.