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MEMSnet Home: MEMS-Talk: Metal mask for bulk machining?
Metal mask for bulk machining?
2001-04-26
Yinyin Zhao
Metal mask for bulk machining?
Yinyin Zhao
2001-04-26
Hi, does anyone know how to use Metal mask for Si bulk
micrmachining? I am going to use KOH etching. Which
kind of metal shall I choose? I will be very thankful
if anyone can give me some information on this.
Thanks!
Yinyin

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