Hi !

I want to ask a question via MEMS clearinghouse.
The question title is " Coating polyimide on the silicone rubber sheet".

The polyimide layer is passivation layer of electrode.
So, I want to coat polyimide on the silicone rubber sheet.
But it is diffcult to have a smooth layer. After coating, it will
condense to a small area very fast.
Does anyone have experience about coating PI on silicone rubber sheet??
Thanks!!



Arron Soung
student
Dept. of Mech. Engrg., Natl. Cheng Kung Univ., Tainan, Taiwan 701
Man-Machine systems Lab.
E-mail: n1689456@ccmail.ncku.edu.tw