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MEMSnet Home: MEMS-Talk: MEMS-EDG Message 2001.263
MEMS-EDG Message 2001.263
2001-05-21
Samir Fejzic
MEMS-EDG Message 2001.263
Samir Fejzic
2001-05-21
Dear all,

I am trying to use the new photoresist of Clariant: AZ 4562 for
achieving high structures, typically around 80 to 100 microns by a
multilayer process.
Does anyone have a special receipe for this photoresist ?
Thanks a lot in advance for your answers,
Samir


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