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MEMSnet Home: MEMS-Talk: Cleaning up metal flakes after liftoff
Cleaning up metal flakes after liftoff
2001-05-29
Dwarakanath Geerpuram
Cleaning up metal flakes after liftoff
Dwarakanath Geerpuram
2001-05-29
hi
I am trying to do a liftoff step for Cobalt.The liftoff is coming out ok but
some metal flakes coming off the wafer are sticking on to my pattern.how can I
remove them?

Thanks
Dwarakanath

"Beware of entrance to a quarrel; but being in,
Bear't that the opposed may beware of thee."
                         -Polonius to Laertes
                          From "Hamlet" , William Shakespeare


Dwarakanath Geerpuram
1028, S.May St. #1F
Chicago, IL 60607

Ph:  (312)316 1091(M)
     (312)413 7581(W)
http://www.eecs.uic.edu/~dgeerpur


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