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MEMSnet Home: MEMS-Talk: Doing very fine line litho.
Doing very fine line litho.
2001-06-07
James Intrater
Doing very fine line litho.
James Intrater
2001-06-07
I am performing some cutting edge lithography on aluminum oxide. I am
fabricating features down to 4 microns in copper with aspect ratios of >4:1.
The process is not too expensive. Right now I am working on 4"x4" ceramic. I
believe that it can be scaled up to larger surfaces, even on polymeric
substrates. Are there any obvious industrial applications (and end
users)that I ought be pursuing? Or, are there fabricators that I ought be
pursuing joint venture with? Please be as specific as possible. I already
realize that people have chatted about: "Oh boy PCB people would love it!".

Thank you,

Jim Intrater
President
Integer Engineering Corp.
jintrater@integer-eng.com


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