Hello Zhang,

Try contacting the following:

AMMT Advanced Micromachining Tools GmbH
A.-Feuerbach-Str. 6
D-67227 Frankenthal
Deutschland/Germany

Tel.: +49-6233-4960014
Fax:  +49-6233-436214

eMail: mailto:info@ammt.de
WWW:   http://www.ammt.de


Regards

Dr Anil Patel

BAE SYSTEMS Infra-Red Ltd
Caswell, Towcester
Northants
NN12 8FH
UK.


-----Original Message-----
From: Zhang Qing Xin [mailto:qingxin@ime.org.sg]
Sent: 05 June 2001 10:59
To: MEMS@ISI.EDU
Subject: TMAH etching equipment.


I'm looking for a TMAH silicon etching equipment which is specially for 6"
wafer, any information is highly appreciated.
Thanks and regards.

ZQX


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