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MEMSnet Home: MEMS-Talk: patterns between two lines by EBeam
patterns between two lines by EBeam
2001-06-15
Howard Lignin
patterns between two lines by EBeam
Howard Lignin
2001-06-15
We will have to fabircate some patterns by E-Beam
lithography between two lines. These two lines are
fabricated by UV lithography.

The problem is how to locate it. It is unlikely to
find the lines after I apply the E-Beam Photoresist,
since they may be covered.

Does anyone knows an applicable way to fabricate this
kind of device?

Thank you very much!

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