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MEMSnet Home: MEMS-Talk: metal etch
metal etch
2001-01-16
Abang Annuar Ehsan
metal etch
Abang Annuar Ehsan
2001-01-16
Hi,

I need to find out how to etch Al-Ni-Au using wet chemical etching
technique, where the metals are stacked on top of one another? what are
the suitable solutions to etch them at once? The process was done using
e-beam evaporator.

Thank you,
annuar.


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