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MEMSnet Home: MEMS-Talk: "Spin on Boron"
"Spin on Boron"
2001-01-19
Chakravarthy Gopalan
"Spin on Boron"
Chakravarthy Gopalan
2001-01-19
Dear Researchers,
       I am a graduate student working on Ultra shallow junction PMOS
devices and I am searching for Spin on / other techniques ( Except ion-
implantation) for doping Boron. I would really appreciate your valuble
suggestions for contacts, links or tips as I am  really new to this field.

--
Chakravarthy Gopalan
Graduate Research Assistant
Dept. of Electrical Engineering
Arizona State University
http://www.public.asu.edu/~cgopala


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