Hi Heyshan,

It should work with a solution of Ammoniumfluoride and Acetic acid
(Merck sells it as AE5050 VLSI etchant). Has anyone tried it (I did not
try it, but I'm very interested and want to use it for our processing,
too)?


regards

Norbert Krause


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MPI-Semiconductor Laboratory
Norbert Krause
Otto-Hahn Ring 6
81739 München

Phone: ++ 49 89 839400-33
Fax: -11
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