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MEMSnet Home: MEMS-Talk: public service for BST deposition
public service for BST deposition
2001-02-12
Sung Kwon Cho
public service for BST deposition
Sung Kwon Cho
2001-02-12
Hello all

Anybody knows public service for BST (or high dielectric constant
material)deposition using sputtering or other equipments?
Thanks.
--
Sung Kwon Cho

Mechanical & Aerospace Engineering Department
University of California, Los Angeles
Los Angeles, CA 90095
TEL : 1-310-825-3977, FAX : 1-413-473-5397
E-mail : [email protected]


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