Ashish,

You might try NJIT. They have a nice MEMS fab with wafer bonding capability.
I
think you can get some hands-on experience with their bonding equipment, as
well.

Here is the contact information:

Dr. Kenneth (Beau) Farmer, Director
tel. (973) 596-5714
email: [email protected]
Dr. Dentcho Ivanov, Director of Technical Operations
tel. (973) 596-5696
email: [email protected]

Regards,

Mike Barger
Technology Development Manager
Brooks Instrument
Hatfield, PA

____________________Reply Separator____________________
Subject:    silicon wafer to wafer bonding
Author: "Ashish Pattekar" 
Date:       2/12/01 5:36 PM

Hello MEMS community..
I would appreciate any information you could provide me about
companies/labs in the U.S. that provide the service of silicon wafer to
wafer bonding of customer supplied Si wafers.

Our group is trying to develop Si chip based microreactors and we need to
bond together silicon wafers to create the reaction chambers but do
not have wafer bonding equipment in our university.

Thank you,
Ashish.

===========================================================================
Ashish Pattekar             | Off.      : 610-758-4668
Graduate Student            | Res.      : 610-954-9352
Department of Chem Engg.    | Email     : [email protected]
Lehigh University,          |
Bethlehem, PA 18015         |
===========================================================================