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MEMSnet Home: MEMS-Talk: high resistivity Cr/Au layers
high resistivity Cr/Au layers
2001-08-02
[email protected]
2001-08-02
Anthony Flannery
high resistivity Cr/Au layers
[email protected]
2001-08-02
Dear all,
We are experiencing problems with high electrical resistivity of Cr/Au thin
films.
The films consist of 0.03um Cr and 0.3um Au, deposited by ion beam
sputtering, with no subsequent heat treatment.

The resitivity we achieve is ~x7 that of bulk gold, we know that 
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