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MEMSnet Home: MEMS-Talk: AlN properties and deposition conditions
AlN properties and deposition conditions
2001-08-06
Sushant.Salgar@asu.edu
2001-09-03
Laurie Valbin
AlN properties and deposition conditions
Sushant.Salgar@asu.edu
2001-08-06
Hi,
I would like to know the properties of Aluminium Nitride that makes it
piezoeletric and the appropriate deposition conditions to either deposit or
grow AlN (Al in presence ofN2 and Ar) on a Al electrode.
Any help would be most welcome and I would be very grateful if anyone could
throw some light on this matter.
Thanks,
Sushant




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