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MEMSnet Home: MEMS-Talk: RTA services
RTA services
2001-08-06
Kevin A. Shaw
RTA services
Kevin A. Shaw
2001-08-06
Hello,
        I am looking for a fab with RTA (Rapid Thermal Annealing) services
available for six inch
wafers.  The fab can be academic or industrial.  I will need to run small test
lots of a
half dozen wafers.  The RTA must have Argon available and will need to attain
temperatures
of up to 850C.  I will need turn-times on the order of several days (48-hours is
preferred).  Thank you.

        Kevin Shaw

----------------------------
Kevin A. Shaw, Ph.D.
Senior Engineer
Calient Optical Components  [Formerly known as, Kionix Inc.]
22 Thornwood Dr.
Ithaca, NY 14850
Phone: (607) 257-1525, x125
Fax:   (607) 257-1612
Email: [email protected]



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