Hi Ken,
AML offers a commercial anodic bonding service. Cost is between ?100 and
?250 per bond depending on quantities and whether alignment is required, and
whether any wafer cleaning is required prior to bonding. Please contact me
for further details.
Regards
Tony
Tony Rogers
Applied Microengineering Ltd
68 Milton Park
Abingdon
Oxon.
OX14 4RX
UK
Tel.: +44 (0)1235 833934
Fax: +44 (0)1235 833935
e-mail: [email protected]
Web:http://www.aml.co.uk
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Kenneth Smith
Sent: 06 August 2001 23:59
To: Mems
Subject: [mems-talk] SOG- Bonding
I am looking for a source for bonding Silicon to Pyrex. Does anyone know
of any suppliers ? I can provide both the silicon and the Pyrex
substrates, but need to source for the bonding.
Please let me know
--
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA 95765 USA
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
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