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MEMSnet Home: MEMS-Talk: Electrodeposited resist
Electrodeposited resist
2001-08-08
Randall Cha
Electrodeposited resist
Randall Cha
2001-08-08
Dear colleagues,

Can anyone provide me some assistance on the followings?

a) selection of electrodeposited resist
b) ready technique of deposition
c) etch resistance to acid and alkali

I am trying to deposit electrodeposited resist over a topological
surface, pattern it and perform either wet or dry etching on my Si
substrate.

I will be glad to share my findings with anyone interested. Many thanks
in advance.

Best Regards,
Randall
DL, Singapore
Tel : 65-415 4447
Fax: 65-794 3430



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