I'm having problem on etching a normal borosilicate glass with HF(conc. 4:1 not
buffered).
The etching process comes irregular and strip off the resist after 25mins I run
the process.
Is there anyone that have a better idea on how to etch it? Someone suggest to
etch the glass using FIB or Ion beam etching technique. Is there anyone that
have experience on that.
Any help would be appreciated.
Thanks
Adriele