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MEMSnet Home: MEMS-Talk: Spherical shapes in Si
Spherical shapes in Si
2001-08-16
Imad Yousef
Spherical shapes in Si
Imad Yousef
2001-08-16
Dear colleagues,

I am trying to etch silicon in spherical shapes. KOH
etching tends to create a flat bottom based on the
mask opening. Do you know of any other technique?

Regards,
Imad Yousef

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