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MEMSnet Home: MEMS-Talk: Etch Rates
Etch Rates
2001-08-21
Bradley, Joe A.
2001-08-22
zhuxiaorui
Etch Rates
Bradley, Joe A.
2001-08-21
Dear Researchers,

I am trying to etch all the silicon oxide from underneath a 30 micron wide
cantiliever. I am using BOE with an etch rate (450-500 A/min). I know that
this will etch on all sides of my cantilever. Is there a way to calculate
the etch time.

Thanks,
Joe




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