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MEMSnet Home: MEMS-Talk: Etching InGaP and GaP
Etching InGaP and GaP
2001-08-21
Rozenn Keravec
2001-08-22
oray orkun cellek
Etching InGaP and GaP
Rozenn Keravec
2001-08-21
Hello everybody,

I am looking for an etchant for a InGaP layer on a GaAs substrate, selective
or not (~10microns).
same question for a GaP layer.

Thank you

R.Keravec

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