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MEMSnet Home: MEMS-Talk: piezocoefficients of p-Si
piezocoefficients of p-Si
2001-08-24
anant narain
piezocoefficients of p-Si
anant narain
2001-08-24
hi!

i am a student of IIT Kharagpur, India, doing my
masters in microelectronics and vlsi design.
i am developing a Si piezoresistive accelerometer
sensor.
i am working in Memcad4.8 and coventorware2001.1,
i need some help regarding the piezocoefficients
of boron doped(.05 ohm-cm) silicon along <110>
direction.and the elastic constants of Si along <110>

thanks,
regards,
anant narain

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