A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Electro-chemical etch stop
Electro-chemical etch stop
2001-08-27
Raymond Chong
Electro-chemical etch stop
Raymond Chong
2001-08-27
Hi,

Can anybody provide me with detail information on Electro-Chemical Etch Stop
(ECE) process or let me know where can I obtain such informations on the
website. All I know is that the wafers are N- epi wafers, however, I need to
know in detail about the process in terms of the how etch stop happen, potential
difference, current drawn and etc. Thanks.

Regards
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Addison Engineering
The Branford Group
MEMStaff Inc.