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MEMSnet Home: MEMS-Talk: Sputtering Pyrex
Sputtering Pyrex
2001-08-29
Robert D White
2001-08-29
Luesebrink Helge
Sputtering Pyrex
Robert D White
2001-08-29
MEMS Researchers,

I am considering anondic bonding of two silicon wafers by first
sputtering pyrex onto one wafer.
Does anyone know of a group who will sputter pyrex?

Thanks,

Robert White
University of Michigan



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