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MEMSnet Home: MEMS-Talk: Sticking layers safe in HF
Sticking layers safe in HF
2001-08-30
Jason Woloszyn
Sticking layers safe in HF
Jason Woloszyn
2001-08-30
Folks,
I am looking for a list of sticking layers that are
resistant to HF attack for getting gold to stay on
poly. It needs to be HF resistant due to the release
etch. I have been told to use chromium, but I can't
use that for other reasons. I would appreciate other
suggestions.
How about Ni?
Thanks for the help.
Jason

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