>MEMS Researchers,
>
>I am interested in extending the resist ( positive ) selectivity for the
>Bosch silicon etch process, from 50:1 to >100 :1. Any suggestions ? Would
>deep UV hardening of the resist help ?
>
>Thanks in advance,
>
>Suresh Ojha
>
>Nortel Networks, HPOCS,
>London Road,Harlow Essex.CM17 9NA. UK.
>Phone 44 1279 403448, ESN 6 742 3448
>Fax 44 1279 402743, ESN 6 742 2743
>[email protected]



Nortel Networks, HPOCS,
London Road,Harlow Essex.CM17 9NA. UK.
Phone 44 1279 403448, ESN 6 742 3448
Fax 44 1279 402743, ESN 6 742 2743
[email protected]