.** ***  JVIG@etdl167

>  I measured the etch rate of several materials in XeF2
Kirt, have you, by any chance, looked at what happens to quartz crystals (i.e.,
single crystal SiO2) in XeF2? We've done a lot of work on etching quartz
crystals in various etchants, but not yet in XeF2. (The week after next, we'll
be reporting the results of our experiments on exposing quartz to anhydrous HF
gas, at the IEEE Frequency Control Symposium, in Honolulu - further info on the
FCS, including the program and all the past abstracts, can be found at http://
bul.eecs.umich.edu/~uffc/uffc_fc.html .) The etching of quartz is highly
dependent on the etchant used, so we'd be very interested in finding out what
XeF2 does to quartz. We'd be happy to send you some AT-cut and SC-cut wafers,
in case you are interested in trying it.

.......................................John.
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           John R. Vig
           U. S. Army Research Laboratory
           Attn: AMSRL-PS-ED
           Ft. Monmouth, NJ 07703-5601, U.S.A.

Telephone: 908-427-4275,    FAX: 908-427-4805
Internet: [email protected]           DSN:  987-
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