Dear Inna,
Thanks for your interest in PMGI....Microchem Corp is the manufacturer
of the aforementioned Resist, I would be pleased to share information
with you .... Please feel free to contact me at mshaw@microchem.com or
by telephone on 617-965-5511 xt 308...
Best regards
Mark Shaw
Product Development & Applications Manager
MicroChem Corp.
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Today's Topics:
1. PMGI (Inna Mushkatinskaya)
2. RE: Hot Embossing Mould Insert (Luesebrink Helge)
3. companies that do wafer bonding in San Diego? (Felix Lu)
4. Acoustic impedance (Sushant.Salgar@asu.edu)
5. Looking for used MEMS equipment (Andy Beregszaszi)
6. Optical Property of SiC (Jiangang Du(John Duke))
7. about etching glass (xuyutao)
--__--__--
Message: 1
Date: Mon, 10 Sep 2001 16:42:30 -0400
From: Inna Mushkatinskaya
Reply-To: innam@anvik.com
Organization: Anvik Corporation
To: mems-talk@memsnet.org
Subject: [mems-talk] PMGI
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Hello,
I'm looking for any information on PMGI. I'm using it as a photo resist
at 248
nm. Does anybody have experience with photolithography use of PMGI. I
have lots
of questions and will appreciate if somebody shares any information with
me.
Thanks a lot,
Inna.
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adr:;;6 Skyline Drive;Hawthorne;NY;10532;USA
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--__--__--
Message: 2
From: Luesebrink Helge
To: oreillye@nmrc.ie, "'mems-talk@memsnet.org'"
Subject: RE: [mems-talk] Hot Embossing Mould Insert
Date: Mon, 10 Sep 2001 17:25:34 -0400
Emer,
The most frequently used techniques are
CNC (Computerized Numerical Control):
Large Features, Stainless Steel, Robust
DEEMO (Dry-Etch Electroplate Mold):
Medium Features, Nickel, Robust
LIGA (LIthography, Galvanoformung, Abformung):
Small Features, Nickel, Short Life
Silicon Etch (Dry Etch, Wet Chemical Etch):
Medium Features, Silicon, Short Life
Best regards,
Helge
-----Original Message-----
From: Emer O'Reilly [mailto:oreillye@nmrc.ie]
Sent: Friday, August 31, 2001 6:52 AM
To: 'mems-talk@memsnet.org'
Subject: [mems-talk] Hot Embossing Mould Insert
Hi all.
I am researching different possibilities to make a mould
insert for our hot
embosser. Apart from the LIGA technique and etching of
silicon, has anyone
any experience of other ways and materials?
Thanks
Emer
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Message: 3
From: Felix Lu
To: mems-talk@memsnet.org
Date: Mon, 10 Sep 2001 15:59:41 -0700 (PDT)
Subject: [mems-talk] companies that do wafer bonding in San Diego?
Hi,
does anyone know of any companies who deal with wafer bonding in the
San Diego area? thanks.
Felix Lu
flu@ucsd.edu
--__--__--
Message: 4
Date: Mon, 10 Sep 2001 17:58:55 -0700 (MST)
From: Sushant.Salgar@asu.edu
To: mems-talk@memsnet.org
Subject: [mems-talk] Acoustic impedance
Hi,
I would be grateful if anybody could give me the acoustic impedence for
the
following materials
AlNOx,SiO2,Tungsten (w) and AlN.
I would also like to know a reference book that would give me the
acoustic
impedence of materials in general.
Thank you,
Regards,
Sushant
Sushant Salgar
Research Assistant,
Center for Solid State Electronics Research,
Electrical Engineering Dept,
Arizona State University.
--__--__--
Message: 5
From: Andy Beregszaszi
To: mems-talk@memsnet.org
Date: Mon, 10 Sep 2001 21:08:36 -0400
Subject: [mems-talk] Looking for used MEMS equipment
Hello all,
I'm looking to purchase a used RIE (preferrably a March CS 1701), a gas
cabinet, and cleanroom equipment. If anyone knows where I may find this
stuff, I'd appreciate it.
Andy Beregszaszi
Graduate Student
Florida International University
Dept. of Mechanical Engineering
--__--__--
Message: 6
Date: Mon, 10 Sep 2001 22:48:29 -0400
From: "Jiangang Du(John Duke)"
To: "MEMS@ISI.EDU"
Subject: [mems-talk] Optical Property of SiC
Anyone can recommend me a resource of optical property for SiC,such like
transparancy,reflection,diffraction coefficient,etc.
Since SiC has so many poly forms, a complete list of its optical
property in various forms is preferred.
--
Regards,
*************************************************
John Duke
**************************************************
--__--__--
Message: 7
Date: Mon, 10 Sep 2001 21:31:12 -0600
To: mems-talk@memsnet.org
From: xuyutao
Subject: [mems-talk] about etching glass
I wanted to etch cover glass up to 50um using Buffed HF with Shipley PR
1818 as an etching mask. However, the photoresist was stripped after 10
min
etching. Also the etching rate is only 500 angstrom /min. So could
someone
tell me how to solve the etching mask problem and also introduce me a
faster etchant? Thanks
Tao YU
ECE Department
Colostate State University
--__--__--
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