A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: CTE data for thin films ?
CTE data for thin films ?
2001-09-13
TEL Klaus Beschorner
2001-09-13
Tom Rust
CTE data for thin films ?
Tom Rust
2001-09-13
My first stop for checking materials properties is the MEMS
Clearinghouse at:
http://www.memsnet.org/material/

My experience is that the Al .5%Cu alloy is pretty much identical to
pure Al.

Ta is listed


TEL Klaus Beschorner wrote:
>
> Hi,
>
> I've done some literature research for CTE (Coefficent of thermal
> expansion) data for some common thin film resistor materials, but
> was only able to find some scattered bulk values.
>
> Can anyone help me out with the CTE of as-deposited (PVD) thin film
> or point me to a potential source ? Of course, this will depend on
> deposition conditions, but anything is better than nothing ;-)
> I'm looking for a 0 - 300 C temperature range.
>
> NiCr
> TaN
> Ta
> Al0.5%Cu
> TaAl (ca. 85 at% Al)
> TiW (ca. 10 wt% Ti)
>
> thanks
> klaus
>
> _______________________________________________
> mems-talk mailing list
> mems-talk@memsnet.org
> To unsubscribe or change your list options, use:
>  http://fab.mems-exchange.org/mailman/listinfo/mems-talk

--
Tom Rust
Nanochip Inc
Box 13249
Oakland, CA 94661
(510) 339-6263
(510) 339-9636 FAX
(510) 912-4662 cell
http://www.nanochip.com


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Addison Engineering
Nano-Master, Inc.
Harrick Plasma, Inc.