My first stop for checking materials properties is the MEMS
Clearinghouse at:
http://www.memsnet.org/material/
My experience is that the Al .5%Cu alloy is pretty much identical to
pure Al.
Ta is listed
TEL Klaus Beschorner wrote:
>
> Hi,
>
> I've done some literature research for CTE (Coefficent of thermal
> expansion) data for some common thin film resistor materials, but
> was only able to find some scattered bulk values.
>
> Can anyone help me out with the CTE of as-deposited (PVD) thin film
> or point me to a potential source ? Of course, this will depend on
> deposition conditions, but anything is better than nothing ;-)
> I'm looking for a 0 - 300 C temperature range.
>
> NiCr
> TaN
> Ta
> Al0.5%Cu
> TaAl (ca. 85 at% Al)
> TiW (ca. 10 wt% Ti)
>
> thanks
> klaus
>
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--
Tom Rust
Nanochip Inc
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