Hi everybody,
 i am making some v-grooves in silicon, and with good suggestion form this
discussion group,i was able to  settle the cleaning problem after wet
silicon etching.
Now my problem is the UNDERCUT. Basically at convex edges i have problem
that the feature instead of being right angled becomes rounded.i use KOH
at 80 deg cel. for etching silicon. how do one take care of this effect?
Regds
Ravi Shankar
Semiconductor Complex Ltd.,
India.