Dear MEMS colleges,

I need to measure the refractive index of PECVD SiO2  film with thickness of
6um deposited on bare silicon wafer. Ideally, the result would be up to
0.001 or even 0.0001 accuracy. Could anyone help me on this?

Thanks in advance!

Jing Liu

MEMS Lab.
Univ. of Maryland
College Park
MD 20742
Tel: 301-405-2981
Fax: 301-403-2976