The best methods are:

(i) m-line spectroscopy (prism coupling)

(ii) ellipsometry.

(i) is generally the most accurate method

K. Cazzini (Ph.D)
Senior Scientist
Alcon Research Ltd.
(508) 651 7631 (ext.104)

----- Original Message -----
From: "jing liu" 
To: 
Sent: Wednesday, September 19, 2001 8:46 AM
Subject: [mems-talk] measure refractive index?


>
> Dear MEMS colleges,
>
> I need to measure the refractive index of PECVD SiO2  film with thickness
of
> 6um deposited on bare silicon wafer. Ideally, the result would be up to
> 0.001 or even 0.0001 accuracy. Could anyone help me on this?
>
> Thanks in advance!
>
> Jing Liu
>
> MEMS Lab.
> Univ. of Maryland
> College Park
> MD 20742
> Tel: 301-405-2981
> Fax: 301-403-2976
>
>
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