Dear Richard,

We at MicroChem have been attempting to solve these problems for many
years with differing amounts of success, we have however found a company
that has developed some equipment that works very efficiently at
stripping SU-8, but utilises high temperatures...The company is Matrix
Integrated Systems...They manufacture a Downstream Chemical Etch system
that will allow the removal at around 10 microns per minute...For more
details please contact Matrix's marketing director Tom
[email protected]....

As mentioned above we have tried a wide variety of techniques for the
complete removal of SU-8 with little success, however our Remover PG
works well to swell the film and eventually lift-off, but this is at
elevated temperatures with the addition of Ultrasound.....Please contact
our UK representative, Chestech for further information on this
product....

Mark Shaw
Product Development & Applications Manager
MicroChem Corp.
1254 Chestnut Street,
Newton, MA. 02464

Tel : 617-965-5511 ext.308
Fax : 617-965-5818





From: "Browning, R (Richard) " 
To: "'[email protected]'" 
Date: Wed, 19 Sep 2001 16:41:09 +0100
Subject: [mems-talk] SU8 removal

We are removing SU8 from copper structures
High temperatures are causing a differential expansion problem.
Does anyone have a method of removing SU8 at room temperature which does
not
remove the copper as well

Thank You
Richard Browning

Phone: + (0)1235-44-6383    Fax: + (0)1235-44-5848
Rutherford Appleton Laboratory
Chilton, Didcot, Oxfordshire, UK OX11 0QX

-----Original Message-----
From: [email protected]
[mailto:[email protected]]
Sent: Wednesday, September 19, 2001 12:01 PM
To: [email protected]
Subject: mems-talk digest, Vol 1 #49 - 7 msgs


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Today's Topics:

   1. Re: microgripper (Tom Rust)
   2. RE: Silicon Germainium wafers (Tom Wester)
   3. InP CTE for temperature range of 50C to 250C (Randall Cha (Dr))
   4. measure refractive index? (jing liu)
   5. Re: measure refractive index? (Karl Cazzini)
   6. AZ 7908 (Lisong Zhou)
   7. SU8 removal (Browning, R (Richard) )

--__--__--

Message: 1
Date: Tue, 18 Sep 2001 11:33:09 -0700
From: Tom Rust 
Organization: Nanochip Inc
To: Roman Ouchkalov , [email protected],
   [email protected]
Subject: Re: [mems-talk] microgripper

Probably the foremost expert on microgrippers is Chris Keller at UC
Berkeley.
contact him at [email protected]

Roman Ouchkalov wrote:

> Dear Ladies and Gentlemen,
>
> I am a student at the Vienna University of Technology.
> Currently, I write my dissertation at the Institute of
> Micro Technique and Precision Engineering of TU Vienna. The
> subject of my dissertation is =E2=80=9Cmicrogrippers=E2=80=9D. I have
t=
o
> make literature research on this topic for my dissertation.
> There is a great interest on this topic in the institute.
>
> To find out the current state of the art it would be a
> great help for us if you could send us any available
> information and publications related to microgrippers. What
> is of interest to us are: general characteristics,
> principles of operation, information about controlling
> system and integration software, characteristics of the
> objects the gripper is designed to handle and prices.
>
> I would be grateful if you could provide me with any
> information. My address is:
>
> Mag. Ouchkalov Roman
> Institute of Micro Technique and Precision Engineering
> (IMFT, E358)
> TU Wien
> Floragasse 7
> A-1040 VIENNA
> AUSTRIA
> e-mail: [email protected]
>
> Thank you very much in advance!
>
> With kind regards,
>
> Mag. Roman Ouchkalov
>
> _______________________________________________
> mems-talk mailing list
> [email protected]
> To unsubscribe or change your list options, use:
>  http://fab.mems-exchange.org/mailman/listinfo/mems-talk

--
Tom Rust
Nanochip Inc
Box 13249
Oakland, CA 94661
(510) 339-6263
(510) 339-9636 FAX
http://www.nanochip.com




--__--__--

Message: 2
Reply-To: 
From: "Tom Wester" 
To: "'Kenneth Smith'" 
Cc: 
Subject: RE: [mems-talk] Silicon Germainium wafers
Date: Tue, 18 Sep 2001 14:57:27 -0400
Organization: ProcessTek

Dear Ken,
ContactVirginia Semiconductor. They fabricate SiGe wafers and have
inventory you can view at
http://www.virginiasemi.com/products.cfm?cat=35

Regards,
Tom Wester

ProcessTek
PO Box 315
Lynnfield, MA 01940
office 781-595-1355, Fax 781-595-9582
[email protected]

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Kenneth Smith
Sent: Monday, September 17, 2001 8:54 PM
Cc: [email protected]
Subject: [mems-talk] Silicon Germainium wafers

This may not be the correct forum, but I have seen some involved in
Silicon Germanium respond here.
I am looking for a source of Silicon Germanium wafers in 3" diameter. I
can supply details specs if suppliers can be defined.

Best Regards,

Ken Smith
"when we were running for our lives, they ran the other direction to
attempt to save us"
http://www.Shark-Cove.com/CR/Code3.html

Kmbh Associates

4968 Charter Road
Rocklin, CA  95765  USA
510-714-5055 Efax- 510 217 4421 or 561 658 6136

High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.

_______________________________________________
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 http://fab.mems-exchange.org/mailman/listinfo/mems-talk



--__--__--

Message: 3
Date: Wed, 19 Sep 2001 08:38:03 +0800
From: "Randall Cha (Dr)" 
To: 
Subject: [mems-talk] InP CTE for temperature range of 50C to 250C


Dear colleagues,

I will very much like to know the coefficient of thermal expansion (CTE)
of InP from 50C to 250C. Any valuable inputs from all?

Many thanks in advance.

Best rgds,
Randall
Principal Engineer,
DLS, Singapore
Tel : 65-4154447
Fax: 65-4154444



--__--__--

Message: 4
From: "jing liu" 
To: 
Date: Wed, 19 Sep 2001 08:46:05 -0400
Subject: [mems-talk] measure refractive index?

Dear MEMS colleges,

I need to measure the refractive index of PECVD SiO2  film with
thickness of
6um deposited on bare silicon wafer. Ideally, the result would be up to
0.001 or even 0.0001 accuracy. Could anyone help me on this?

Thanks in advance!

Jing Liu

MEMS Lab.
Univ. of Maryland
College Park
MD 20742
Tel: 301-405-2981
Fax: 301-403-2976



--__--__--

Message: 5
From: "Karl Cazzini" 
To: "jing liu" , 
Subject: Re: [mems-talk] measure refractive index?
Date: Wed, 19 Sep 2001 10:49:32 -0400

The best methods are:

(i) m-line spectroscopy (prism coupling)

(ii) ellipsometry.

(i) is generally the most accurate method

K. Cazzini (Ph.D)
Senior Scientist
Alcon Research Ltd.
(508) 651 7631 (ext.104)

----- Original Message -----
From: "jing liu" 
To: 
Sent: Wednesday, September 19, 2001 8:46 AM
Subject: [mems-talk] measure refractive index?


>
> Dear MEMS colleges,
>
> I need to measure the refractive index of PECVD SiO2  film with
thickness
of
> 6um deposited on bare silicon wafer. Ideally, the result would be up
to
> 0.001 or even 0.0001 accuracy. Could anyone help me on this?
>
> Thanks in advance!
>
> Jing Liu
>
> MEMS Lab.
> Univ. of Maryland
> College Park
> MD 20742
> Tel: 301-405-2981
> Fax: 301-403-2976
>
>
> _______________________________________________
> mems-talk mailing list
> [email protected]
> To unsubscribe or change your list options, use:
>  http://fab.mems-exchange.org/mailman/listinfo/mems-talk



--__--__--

Message: 6
Date: Wed, 19 Sep 2001 11:22:09 -0400
To: 
From: Lisong Zhou 
Subject: [mems-talk] AZ 7908

dear mems colleges,

Could anyone give the photo lithography parameter for AZ 7908?
Is it able to make undercut from it?

thanks,

lisong
The Pennsylvania State University
Department of Electrical Engineering
121 Electrical Engineering East
University Park, PA 16802

phone: (814) 865-1267
fax: (814) 865-2798
[email protected]



--__--__--

Message: 7
From: "Browning, R (Richard) " 
To: "'[email protected]'" 
Date: Wed, 19 Sep 2001 16:41:09 +0100
Subject: [mems-talk] SU8 removal

We are removing SU8 from copper structures
High temperatures are causing a differential expansion problem.
Does anyone have a method of removing SU8 at room temperature which does
not
remove the copper as well

Thank You
Richard Browning

Phone: + (0)1235-44-6383    Fax: + (0)1235-44-5848
Rutherford Appleton Laboratory
Chilton, Didcot, Oxfordshire, UK OX11 0QX




--__--__--

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End of mems-talk Digest