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MEMSnet Home: MEMS-Talk: resistivity values of TaN and TiW
resistivity values of TaN and TiW
2001-09-27
Adnan Merhaba
resistivity values of TaN and TiW
Adnan Merhaba
2001-09-27
Hello,
can anyone give me numbers ( or source and/or reference where I could dig
up) for  bulk resistivity values of tantalum nitride (TaN) and titanium
tungsten (TiW).
thank you,
adnan

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