I would like to now if it is possible to find informations about the surface
energy of common materials used for MEMS
applications, for example the surface tension of Si, SiO2, Si3N4 etc.

Thank you very much

Ph. Luginbuhl


Dr. Ph. Luginbuhl
Microflow Engineering S.A.
Head of Aerosol Systems Research & Development
Rue Jaquet Droz 7
CH- 2007 Neuchbtel
Switzerland

Phone: + 41 32 720 51 61
Phone (direct): + 41 32 720 54 78
Fax: + 41 32 720 57 89
www.microflow.ch
e-mail: [email protected]