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MEMSnet Home: MEMS-Talk: Re: TEOS deposition facility
Re: TEOS deposition facility
2001-10-10
Kenneth Smith
Re: TEOS deposition facility
Kenneth Smith
2001-10-10
Dear Davorin Babic,

Came across this email from back in June- Hopefully you have located a
source for your TEOS by now. If not Process Specialties, Seaway
Semiconductor and Straglas can all do this. All three are located in
Northern California.
Should you need any Silicon, let me know as I can supply very high
quality at very competitive pricing from 100um to 15000 um thick in
Single and Double Side Polished surfaces.

--

Best Regards,
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA  95765  U  S  A
510-714-5055 Efax- 510 217 4421 or 561 658 6136

High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.



Dado Babic wrote:
>
> Hello,
>
> I am looking for a facility that can deposit 1.5 micron of TEOS based oxide
> on 4 or 6 inch Si wafers.  Any assistance in locating such a facility will
> be much appreciated.
>
> Thank you,
>
> Davorin Babic
> Chromux Technologies, Inc.
> ph: 818-727-0060 x5304
> fax: 818-727-0038
> dbabic@chromux.com

reply
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