> Date: Thu, 30 May 1996 11:59:01 -0400 (EDT)
> From: Michael Hershey 
> Subject: RIE services
> To: MEMS@ISI.EDU
> Does anyone know where I could go to get Reactive Ion Etching (RIE)
> work done (to remove silicon and silicon oxide) on a few wafers?
> I understand Berkely may provide this service.
The University of California at Berkeley - Microfabrication Laboratory
(Microlab) equipment capabilities can be found in our www sight: http://
argon.eecs.berkeley.edu:8080/Microlab.html

Process related inquries should be directed to: John Knudsen, Process
Supervisor: jknudsen@argon.eecs.berkeley.edu

We have several etchers. Our standard cmos etchers consist of 4 Lams:
Lam 490 nitride
Lam 580 oxide
Rainbow 6400 poly
Lam 690 aluminum

The Rainbow 6400 is the only Lam etcher capable of RIE. We do not currently
operate the Rainbow in the RIE mode.

Sincerely,
Bob Hamilton
Maint. Sup.
o