I am interested in simulation tools for plasma dry etching.
SPEEDIE availabe free of charge from Standford University runs only on some
old Unix machines which we do not have. I was wondering whether a version
running under Linux or DOS was available. (The e-mail adress stated on the
SPEEDIE-homepage (http://www-tcad.stanford.edu/) doesn't seem to work
anymore.) Also, it seems that the latest version available via ftp is
version 3.0 from 1991. Is there any newer version commercially available?

Could you give my some advice (Homepages, company names) on other plasma
etching simulation tools (freeware, academic versions or commercial
software)?

With best regards

Burkhard Volland