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MEMSnet Home: MEMS-Talk: Fabrication of micro structure based on PMMA
Fabrication of micro structure based on PMMA
2001-11-03
Wong Tak Sing
2001-11-05
reinhardt
Fabrication of micro structure based on PMMA
Wong Tak Sing
2001-11-03
Hi MEMS people,

  I would like to ask whether there are ways to make a micro structure
(depth:200um, length:10mm, width:5mm) on the PMMA substrate.  The micro strucure
is made of PMMA.  Could anyone suggest me the way how to fabricate the structure
(by etching, laser cutting etc.)?

  Thank you in advance!

Victor
Student Researcher
Center for Micro and Nano Systems
The Chinese University of Hong Kong




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