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MEMSnet Home: MEMS-Talk: plasma cleaner vs. RIE
plasma cleaner vs. RIE
2001-11-05
Smith Gabriel L (Gabe) IHMD
plasma cleaner vs. RIE
Smith Gabriel L (Gabe) IHMD
2001-11-05
We are interested in purchasing a plasma cleaner. I have heard and read that
an RIE can also plasma clean. Does an RIE clean as well as an apparatus
designed specifically for plasma cleaning? Any advice is greatly
appreciated.

Thanks,
Gabe Smith

reply
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