hi all..
I have been working on capacitive micromachined ultrasonic
transducers(cMUTs) and having a hard time to test them. My design consists
of an array of rhombus shaped membranes which are hanging over another
silicon membrane. I was trying to test them by using an optical readout
system where I was looking at the deflection of the membrane, but I wasn't
able to get any data out of that. Can u guys suggest me methods to test
them?. Link below talks abt the device
http://www.cep.tntech.edu/mems/cMUTs%20abstract.pdf

Any feedback would be appreciated,thnks for ur time.

with regards

Babu(Panduga)
Graduate Research assistant,
Tennessee Technological University,
Cookeville,TN 38501
Tel-931-372-6428