Hi. I'm also interested in designing the MEMS switches as you are. It has
not been a long time since I started working on this topic. But I have
read many papers relevant to this.. But it seems to be hard for me to get
the papers and books describing exactly how to design them, most papers
I've looked for just includes the spec. of their designed devices.
In terms of the relation between the fringing capacitance and the height
of membrane, I'm not sure exactly, but I would say we don't have care
about this relation that much.
I also have some questions regarding MEMS switches, which is about the
tools to simulate the designed devices. I've just heard there is a new
and challenging software to simulate the 3-dimensinal device, considering
the mechanical and electronic effects. Except for that, do you know if
there is any other tools available to simulate ? Your answer will be very
appreciated.
Thanks.
>From: "Marita Canare" >To: [email protected] >Subject: [mems-talk]
MEMs shunt switch >Date: Mon, 05 Nov 2001 13:48:49 +0800 > >Hi! > >I have
a question regarding the dimensions of the MEMs shunt switch: > >How do
you determine the correct ratio for G/W/G? where G - distance >from >one
gold strip to another; W- width of the gold strip. For example, >i have
>read somewhere that he used G/W/G = 60/100/60 um (50ohms)... why do >you
>think he used those values? > >Also, what is the relation of the
fringing capacitance to the >membrane >height? > >Thank you very much! I
really appreciate it. >
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