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MEMSnet Home: MEMS-Talk: coating of silicon with aluminium
coating of silicon with aluminium
2001-11-09
Matthias Kruse
coating of silicon with aluminium
Matthias Kruse
2001-11-09
Hi!
I am trying to coat silicon (111) with aluminium and have a problem
concerning the grain size. After the coating of about 1 micron of
aluminium I find grain diametres of about 50 to 80 nm. That is too
less for my application. I do need grains so big as possible (more
than a micron). Has anybody an idea?



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Dipl.-Chem. Matthias Kruse
Institut fuer Anorganische Chemie
Fachbereich 8
Universitaet Essen
Universitaetsstr. 5-7
45117 Essen

Tel.  +49 (0)201 183-4515
Fax.  +49 (0)201 183-4195
email matthias.kruse@uni-essen.de
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