Try AFM (Atomic Force Microscopy).  This is one of the few techniques that
can operate at this level.  If your sample is conductive, you can use the
variant known as Scanning Tunneling Microscopy, which allows a few other
things to be learnt about the sample.  The biggest supplier of AFMs is
probably Digital Instruments.  Check their website for more information on
the technique.

Regards,

Martin Walker (Oxford Instruments)
----- Original Message -----
From: "Jiangang Du (John Duke)" 
To: 
Sent: Saturday, November 10, 2001 3:27 AM
Subject: [mems-talk] Surface Roughness


> Dear all,
> Can anybody recommend my a method or a instrument that will measure
surface roughness down to 1 anstrom.
> Thanks a lot
>
>
>
>
>
> Regards,
>
> John Duke
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