A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RE: stressed membrane simulation using ANSYS - mems-talk digest, Vol 1 #89 - 17 msgs
RE: stressed membrane simulation using ANSYS - mems-talk digest, Vol 1 #89 - 17 msgs
2001-11-13
Pancham R. Patel
RE: stressed membrane simulation using ANSYS - mems-talk digest, Vol 1 #89 - 17 msgs
Pancham R. Patel
2001-11-13
Hello Kyu,

Actually, there is a separate yahoogroup for Ansys users.
There are ~1800 members and I think you would be able to get your answers
there.
Send email to "[email protected]"  for subscribing to the
group.
Or go to www.yahoogroups.com and search for xansys.

Pancham R. Patel.

> Message: 11
> Date: Thu, 8 Nov 2001 19:20:42 -0500 (EST)
> From: Kyutae Yoo 
> To: 
> Subject: [mems-talk] stressed membrane simulation using ANSYS
>
> Hello All,
>
> Does anyone know how to simulate a tensile stressed membrane
> using ANSYS? I have done modal, static, and harmonic analysis
> without any stress in the membrane using ANSYS, but since I am
> going to fabricate the membrane out of LPCVD SiN, I am expecting
> to have some intrinsic tensile stress (100~200 MPa) in reality.
> So, how do I include this tensile stress effect for the analysis?
> By the way, we use ANSYS 5.7
> Thank you for your help
>
> Q

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
The Branford Group
University Wafer
MEMS Technology Review